Contemporary analysis technology considers to apply mediumly in filmy material

Ray of X of 1 electron bougie shows ray of X of bougie of differential analyse electron to show small analysis (EPMA, electron Probe Microanalyser) is method of analysis of composition of a kind of when compare ideal at present small area. Electronic bougie appearance uses the principle of high-energy electron and solid matter interaction, pass energy enough surface of sample of bombard of electron beam of a tall bundle of fine focusing, inside the small area bulk that in finite deepness and side direction expand, arouse signal of ray of generation feature X, their wavelengh (or energy) with intensity it is token it is important that this place inside small area combines element and its pH indicator information, use proper music appearance and detect, the goal that computation system can achieve composition to analyse. Ray of electronic bougie X shows differential analyse, can analyse atomic number to be 4 ～ the element of 92. To the analysis of small element, need special condition and technology. Be more than yuan of always of 10 to say to atomic number, the opposite precision of quantitative analysis is about 1% . The area that it analyses is very small, can arrive from 1µm3 commonly a few µm3, analyse the size of limits to be able to adjust artificially, the very move quantity of the element that be measured can amount to 10-10g, other analysis method realizes this hard. Electronic bougie analysis has 3 kinds of kind: Small area of surface of sample of ① make choice of, make the scanning of full a fair amount of confidence that nods surely, undertake ration or half ration analysis, include what to add up to elemental chroma to undertake quantitative analysis to its; ② electron beam can make place combine elemental pH indicator along the linear contrail of sample surface make choice of line scanning analysis, ③ electron beam makes scanning in sample surface, make brightness of CRT fluorescent screen with the X ray signature of specific element, give out the scanning image that elemental chroma distributings, the Qing Dynasty of sex of content of the distributinging state that wins the element inside small area thereby, filmy appearance and structural feature besides, can observe one side undertakes composition is analysed at the same time, the relation of the structure of filmy to research material and its component is very convenient. At present new-style EPMA can undertake Gao Lingmin's ultimate analysis in sample micron area, control system is digitlized entirely, observation, analysis needs to use mouse, keyboard only, the operation is very handy, can undertake through Internet the computer is operated. Accordingly, EPMA already became filmy material to study indispensable method. 2.

2 ionic bougie show differential analyse ion bougie shows small analysis (IMMA, ion Microprobe Mass Allalysls) is one kind uses mass spectrograph to have the unit of ultimate analysis to 2 ion that arouse from solid sample surface. Ionic bougie shows differential analyse is the ion that ion that uses ionic source generation forms energy to be 1 ～ 10Kev quickly bundle, hit its to sample surface generation next, lose ion 2 times to introduce mass spectrograph, the carry on one's shoulder below the record after classics enlarge is compared character (what M/e) reachs its intensity and pledge according to carry on one's shoulder than mixing intensity has an element is qualitative with quantitative analysis. Use ionic bougie to show differential analyse to be able to undertake as follows analytic: ① isotope is analysed; Tall sensitivity of ② small element is analysed, ③ paper-thin surface (the analysis of 1000A) of about 10 ～ , ④ is in after giving proper condition, can make include fore-and-aft three-dimensional analysis. When using ionic bougie to make the qualitative or quantitative analysis of filmy constituent, to eliminate sample appearance pollution and adsorptive influence should increase ion bundle undertake engraving corrode, narrow again next ionic bundle spot diameter undertakes an analysis. When making fore-and-aft analysis, should consider each factor such as fore-and-aft resolution, titer, sensitivity and three-dimensional observation, must control strictly measure a condition. The ability that ionic bougie shows small analyzer to explore ionic scanning to resemble is taller, distributing when certain element so use and the diagnostic X ray of EPMA is spent like income line bad or when be being explored hard, use ionic bougie to show differential analyse law to be able to achieve satisfactory result. 2.

3X ray photoelectron can photoelectron of ray of chart analysis X can chart is analysed (XPS, x-ray Photoelectron Spectroscopy) is to use X ray source to produce sample of very strong X ray bombard, arouse an electron from inside sample, introduce its energy analyzer, explore the electron that analyses through energy, make the X ray distributinging plan to energy -- X ray photoelectron can chart. It can be used at the oxidation condition of condition of chemistry of divisional metalloid atomic and metal, call bluff credit analyse photoelectron again so can music magic art (ESCA, electron Spectroscopy For Chemical Allalysls) . Use XPS to be able to undertake removal of hydrogen embrittlement beyond the qualitative, ration of all element and chemical condition analysis, its explore deepness to rely on an electron average and free Cheng, to metal and its oxide, exploration deepness is 5 ～ 25A. The absolutely sensitivity of XPS is very tall, it is one kind exceeds microanalysis technology, the place when the analysis needs sample very few, general 10-8g is controlled can, because this XPS is one of analytic steps with filmy the most significant material. 2.

4 Russia rest electron can chart analysis Russia rests electron can chart is analysed (AES, auger Electron Spectroscopy) is to use incident electron beam to make ionization of atomic lining energy level, generation rests without radiation Russia transition, russia rests the electron escapes in vacuum, method of exploration a kind of analysis has to its in vacuum with electron spectrometer. In the analytic respect of component of filmy material chemistry, russia rests electron can chart is the analytic method with most wide application, it can be right the chemical component inside limits of 20A of ～ of exterior 5 undertakes acute analysis, analytic rate is rapid, can analyse all elements from Li~U, not only can quantitative analysis, and the Qing Dynasty that can offer chemistry to join state besides. When the fore-and-aft component that has filmy stuff is analysed, the ion of usable hydrogen or other inert gase waits for an analysis to undertake splashing ejaculation engraving corrode partly to sample, undertake Russia rests at the same time electron can chart analysis, get filmy material distributings along fore-and-aft elemental component thereby. 2.

2 times 5 ionic mass spectra analyses ionic mass spectra 2 times (SIMS, seconday Ion Mass Spectrometry) is to use high-energy ion and solid reciprocity, cause matrix atom and element with be being mixed neuterly two kinds of electrified condition blast off come out, the electrified particle that arises to this through mass spectra technology of Gao Lingmin (namely 2 ion) undertake detecting, undertake elemental analysis thereby. 2 times ionic mass spectra analyses the ultimate analysis technology that is a kind of Gao Lingmin. In certain application limits, of AES and XPS detect sensitivity cannot be satisfied determine requirement, and SIMS is had taller detect sensitivity, those who make become detect the good method of trace element, its detect floor level is the quantitative class of hundred, to trace constituent can undertake deepness chroma is analysed, its deepness resolution is less than 50A, can be in microcosmic on (µm class) the transverse feature that observes the surface. Because SIMS is a mass spectrograph, because this is in all filmy data analysises, only it can analyse complete element to be able to differentiate elemental isotope again already, also can analyse compound and the molecular structure that determine compound. In addition, all as usable as the solid matter with compatible vacuum SIMS are analysed. Because the information deepness of SIMS is very small,the surface is analysed, in static SIMS and good vacuum (can analyse below 10-8pa) condition most the atomic layer of surface layer. In exterior analysis, can identify exterior material and research surface with it kinetic process, identify composition of exterior contaminant, surface and become apparent to learn a structure for example. Deepness section plane analyses this is the most fundamental application of SIMS probably. With ion bundle successive bombard sample, make the surface receives one layer " the ground is come off, come off while detect one plant or 2 ion that a variety of elements and bombard time concern into function flow. Below constant quarter corrode rate, bombard time and deepness become direct ratio. Concern measures ionic electric current with the function of bombard time next the relation that changeover is the same as deepness for chroma, this is law of analysis of deepness section plane. This method can use research to diffuse process and the interlining structure that determine diffusion coefficient, filmy material and adulteration and pollution, the chroma gradient that still can be used at studying isotropy. Analysis of small divisional analyse, face and three-dimensional analysis are small the area is analysed even if be opposite beforehand the area that the diameter of make choice of is a few micron undertakes an analysis, this usable small diameter (ion of <1µm) bundle will finish. Elemental face distributings even if affirmatory element is in sample apparently distributinging condition. Commonly used method has two kinds, namely law of small bougie of ionic microscope and scanning. Ionic formation of a imagine is 2 ion bundle optics resembles the exterior ion that the ionic and optical system that adopts mass spectrograph gets. Scanning small bougie is to use the method that is similar to electronic bougie, move mass spectra some quality number, with fine ion bundle scan to sample, the element that gets the face distributings graph. A few effect that will study crystal boundary precipitation, metallurgy and single crystal with it, diffuse (the XY feature of cross section) , of the look feature of filmy material and exterior impurity distributing. The face the element distributings and deepness analysis is united in wedlock, with respect to the three-dimensional information that can get the element distributings, this information is multivariate to research alloy film is very useful. In filmy data research, applying SIMS ration to analyse is difficult, because SIMS spectral line is complex, cause difficulty of identification of spectrogram, and the month can make as a result of ionic bombard sample surface is damaged, attribute ruinous analysis consequently, this is the main problem that SIMS exists at present. But SIMS often succeeds in dispute of qualitative analysis respect, because this is in filmy data research more and more be taken seriously. 2.

Nuclear reaction of law of analysis of 6 nuclear reaction analyses a way (NRA, the foundation of Nuclear Reaction Allalysls) is incident particle and target atom produce nuclear reaction, the microelement that will analyse sample surface layer with it and determine the ion in some kind of impurity or film permeates the surface of the ionic chroma of matrix and edge deepness direction distributing. Use NRA technology to undertake analytic is like issueing a characteristic to filmy material: Precision of ① ration analysis is tall, the error is small; Sensitivity of ② complete analyse can amount to 10-12, OK and accurate, fast, nondestructive analyses ③ sample. Nextpage2.

7 backs scattering can music technology is incident the nucleus flexibility in ion and target material collides and produce old point of view (90 ° of ＞ ) the phenomenon of scattering, call back scattering. Back scattering can chart is analysed (RBS, the main purpose of Rutherford Backscattenng Spectromctry) is to determine carry scattering particle on the back can chart, analyse can chart information. Back scattering can chart offerred elemental sort distributinging information of deepness of edge of information, element and elemental chroma information, can undertake qualitative, quantitative analysis and ion fore-and-aft distributinging analysis. Other projects chart instrument like glow discharge light (GDOES, chart of annihilation of Glow Discharge Optical Emission Spectroscopy) , positron (PAS, radiate of Positron Annihiation Spectroscopy) , feebleminded photon (LEPI, low Energy Photon Irradiation) , infra-red chart (IR, resonance of Infrared Spectroscopy) , nuclear reaction (RNR, chart of loss of energy of electron of Resonance Of The Nuclear Reaction) , high resolution (HREELS, the surface such as High Resolution Electron Energy Loss Spectroscopy) analyses a technology also in more and more analysises that use at filmy material. The analysis of constituent body appearance that the constituent body appearance of 3 filmy material analyses filmy data basically is the appearance of microcosmic organization body that watchs filmy stuff, include appearance of exterior form appearance, the form between filmy layer, join interface and appearance of fracture surface form and metallographic organization with matrix. The constituent structure that the purpose of observation is the constituent pattern that knows filmy stuff, interface (deny decarbonization to wait so) , dimension of blemish, grain. Pass further analysis, the unripe long mechanism that studies filmy data, mechanical function and physical function. The microcosmic organization of filmy material and form appearance observe the simplest method is the exterior form appearance that watchs filmy stuff with metallographic microscope and metallographic organization, understand filmy form appearance feature complete and intuitionisticly, but the restriction that accepts enlarge multiple as a result of metallographic microscope, can use only measure relatively the ply of thick film layer and the grain that observe the general picture that the surface organizes, large size and bigger drawback. Because this is filmy,the analysis of constituent body appearance of material uses an electron to show differential analyse skill mostly. 3.

1 electron shows differential analyse " blast off " scanning electron microscope (SEM, scanning Electron Mcroscpe) is to use the electron beam of fine focusing to pass synchronism to collect what arouse from sample surface place in scanning of sample surface pointwise all sorts of electrons (basically be electron, back scattering electron 2 times) signal comes modulation is become picture. 2 times the resolution of electronic resembling can amount to scanning report lens to come rice of a few accept, enlarge multiple from arrive severalfold 500 thousand times. The advantage of scanning report lens is depth of field big, filmy material surface has bigger scraggly when the picture that also can get clarity, the exterior form appearance that is used at watching filmy stuff and appearance of fracture surface form are very convenient, it is the important step that appearance of microcosmic organization body watchs filmy stuff. With CVD diamond film is exemple, to analysing the surface of diamond film and appearance of cross section form, if crystal is diamond grain size, small facet (if {111} , {100}) is preferred orientaton, " cauliflower " shape diamond aggregation, diamond grows on facet of spiral, diamond microscopical of section of surface roughness of the space between hole, grain, surface, film columnar brilliant grows direction and size, using scanning report lens to analyse is the directest and effective method. The sample preparation of scanning electron microscope is very handy, to conductor, outside getting the formulary range that exceeds an instrument except requirement measure, should use electric gum only its stickup the sample that makes in copper or aluminium on, put sample room to be able to undertake an analysis. To the sample that conductivity is differred or is isolated from, need layer of electric conduction of plating of click of the tongue. Transmission report lens (TEM, transmission Electron Mcroscope) is the sample of bombard of monochromatic electron beam that uses tall focusing, the electronic signal enlarge that will cross sample through a series of electromagnetism lens comes into the electronic telescope that resemble. Transmission report lens magnifies multiple can amount to hundred thousands of times, resolution is in commonly 0.

2 ～ 0.

3nm, special the appearance of imperceptible organization body that agrees with to consider and watch filmy stuff. For example, use cross section (the transmission report lens of Cross Section) sample observes (bright field resembles or) of dark field photograph, the growth that can get clarity child of reaction of ply of the substructure of crystal of the diamond on direction and blemish type, film, interface (or substance appearance) , film / base the image of the micromechanism such as the interface. If match,use electorate electron diffraction (SADP) can be informed different thing appearance (especially interfacial substance appearance) crystal structure, organization structure and each other to the relation. And the T cangue observation that passes planar sample, the small structure information of the bound between the substructure inside the volume that can show diamond grain very clearly, grain and blemish type, grain. Sample of requirement of transmission electron microscope is right electron beam " transparent " , electron beam is penetrable the ability of solid sample, basically depend on quicken voltage (or electronic energy) with sample material atomic number. Generally speaking, quicken voltage taller, sample atomic number is smaller, the sample ply that electron beam can penetrate is bigger. To the electron beam of 50 ～ 100kv, sample ply control is in 1000 ～ 2000A is advisable. Because preparation is such small sample is very difficult, film flakes extremely easily from matrix, so the preparation of sample needs rich experience and skill. 3.

Microscope of 2 nuclear power is analysed 1982 by G.

The person development such as Binnig scans the first times successfully channel microscope (STM, scanning Tunneling Mcroscope) , make human first time can observe individual atomic arranges corporeal appearance state and the physics that concern with exterior electron behavior, chemistry. On this foundation, each country scientist invented a series of new-style microscope early or late again, wait like microscope of nuclear power microscope, attrition force microscope, electrostatic force. Nuclear power microscope (AFM, atomic Force Mcroscope) is a basis below extremely fine cantilever pinpoint and adjacent detect when sample surface sample and pinpoint the active force between (nuclear power) in order to survey the plant of exterior configuration. Use a scanner to scan sample in the high accuracy on three-dimensional direction, cantilever dogs the exterior configuration with sample fine face, use computer control and processing, the sample surface of fold of the resolution under rice of attainable accept, millionfold above is concave and convex picture. The advantage that compares nuclear power microscope with photograph of scanning report lens is OK the exterior form appearance that land of tall in atmosphere times watchs filmy stuff. The occurrence that says AFM so was structure of analysis and surface of research film stuff to provide the most advanced measure, promoted the development of filmy material greatly. Use AFM to be able to obtain the exterior structure information of high quality not only, and the interaction that can study solid interface. The appearance of substance of crystal structure analysis of 4 filmy material (abbreviation photograph) it is to have structure of some kind of crystal to be able to use some chemical type token its chemistry component (or have certain component limits) solid matter. Substance appearance analysis includes analysis of chemical substance appearance and physical substance appearance to analyse two kinds big, former the method that is chemically analysis (the small division that includes certain physics instrument ultimate analysis) determine to the element of substance appearance is comprised and combine an amount, in order to get the chemical form of substance appearance, accordingly it is comprised with the element of substance appearance only relevant, and have nothing to do with the crystal structure of substance appearance, analysis of physical substance appearance includes configuration to analyse structure of He Jing system to analyse two respects. Structural analysis has a variety of methods again, but it is most important to be analysed with all sorts of diffractions, with crystal diffraction as a result of them the phenomenon is a foundation, so diffractive photograph analysis can acquire the crystal structure of substance appearance already, can win the chemical type of substance appearance again, because this diffraction analysis is the directest, the physical look with the most comprehensive application analyses a method. Diffractive analysis method includes X ray diffraction, electron diffraction and neutron diffraction 3 kinds, among them X ray diffraction is used the widest, it is a kind of more classical, old technique. Come nearly 20 years, spend appearance of X ray diffraction as a result of high power, high accuracy, tall stability and Gao Lingmin appear, especially after the computer applies at the control of diffractive appearance and data processing, in X ray diffraction analytic respect had a lot of new progress, if qualitative analysis is medium in analysis of the computer retrieval, photograph that do not have card, quantitative analysis lustre lukewarm (the new method such as Zevin) law, the Liteweierde that whole structure of data of diffraction of the computer method that index of pattern of diffraction of the many brilliant in analysis of substance appearance structure changes, much brilliant analyses (Rietveld) method. Because union of electronic diffraction and transmission electron microscope is used, especially the wide application of electorate diffraction technology, analysis of appearance of electronic diffraction substance also appeared new phase, especially qualitative analysis had the content look of pattern of diffraction of single crystal electron very great progress. Although neutron diffraction can have a test in a few unit only at present, but structure of position of coordinate of small element atomic, magnetism determines in be being analysed to the structure determine to have special sense with the research of certain solid solution, because this applies,also add gradually much. 4.

1X ray diffraction analyses corporeal composition to analyse the most commonly used method is analysis of X ray diffraction (XRD, x-Ray Diffraction) , it is to be based on X ray to abide by Prague in the diffractive phenomenon in crystal (Bragg) law undertakes an analysis. When analysing foregone chemistry to form crystal structure of material, can be worth by the evening of X ray diffractive peak, beg span of face giving any crystalline substance, contrast ASTM card, analyse the crystal structure of a material that be measured. When the crystal structure that analyses filmy data with X ray diffraction, should consider the impact of result of analyse of filmy ply bisect, there should be identical chemical component in base material and filmy material, and filmy ply is when 1 ～ 2µm is the following, should notice to remove the interference of diffractive peak end matrix back. Physics enrages deposit film, its chemistry is comprised often the chemistry of deviate material is metric, still can arise sometimes preferred orientaton, bring about X ray diffractive peak deflection and each peak intensity of diffractive peak produce change, this is the issue that needs an attention in the analysis. 4.

Because electron beam is penetrable,2 electrons diffraction is analysed the ply of sample is very small, the electron is accordingly diffractive (ED, rectron Diffraction) is the significant step of a kind of filmy analysis, it is paper-thin (ply is a few or hundreds of dust quantitative class) the effective method that exterior content appearance analyses, and other and diffractive standard cannot be compared. Use transmission, especially electorate electron diffraction is analysed, be like next characteristics: Sensitivity is very tall, connect small to hundreds of even a few dust microcrystalline also can give out clear electronic diffraction pattern, accordingly its detect be restricted very low, special apply to: Style measures the country very few, the oxidation that is like matrix and filmy surface and pollution are analysed, substance appearance is measured to combine an amount in sample in very low the minim precipitation that adds crystal boundary, the 2nd photograph inside grain inchoate precipitate beforehand the analysis that wait, the temple measures the country the size of substance appearance is very small the microcrystalline analysis that adds crystallization to begin to generate. Electorate and diffraction of small area electron give out commonly pattern of diffraction of single crystal electron, should appear when sealed new structure, compare pattern of diffraction of X ray much brilliant possibly to be analysed easily sometimes. On the other hand, what still can get the information of the relation adds crystal to grow concerned crystal orientaton is preferred the orientaton relation of matrix of get along with of orientaton, separate out. Analysis of appearance of electronic diffraction substance is OK observation of as diffractive as the electron microscope photograph undertakes at the same time, still can get concerned the size of substance appearance, configuration to reach distributing etc, if the electron microscope is accessary,have can chart appearance, still can give out the chemical component that analyses area. 4.

3 neutron diffraction analyses the progress as nuclear reaction technology, neutron diffraction technology (ND, the application of Neutron Diffraction) is increasingly wide also, in substance appearance analysis and magnetism structure determine the respect succeeds particularly. But as a result of the limitation of radiation source and diffractive experiment device cycle of giant, test grows wait for defect, cannot use in that way like X ray and electronic diffraction go to the lavatory and extensive. Neutron diffraction is had a few other the characteristic that two kinds of diffraction do not have, because this is in following a few respects have distinct advantage: In crystal structure analysis, neutron diffraction is to determine the method with better place of small element atom. Because amplitude of X ray scattering and atomic number become direct ratio, so X ray combines a large number of information that hydrogenous compound perhaps cannot get when the oxide of heavy element, carbide in research, the structure that uses neutron diffraction is analysed (include much brilliant sample and single crystal sample) solve more easily. In filmy material and base material, differ as a result of the amplitude of X ray scattering of a few elements very small and differentiate hard, and neutron diffraction parts his very easily, still can identify all sorts of isotope of same element. Magnetism structure determines is one of the largest contribution that neutron diffraction studies to solid. Because neutron radiate and the atomic interaction generation that have magnetic moment are additional magnetism scattering, make neutron diffraction is become determine the diffractive method with crystal china only construction. The target that involves has transfer metal and its alloy, rare person metal and its alloy and close oxide of magnetic moment atomic, sulfide and halide wait. 5 epilogue above introduced technology of a few kinds of contemporary tests to be in the application in appearance of body of filmy material component, organization and crystal structure research is clear besides, but of the mechanical property that did not include filmy material, adhesion and stress determine. From all sorts of contemporary analysises the technology analyses medium applied characteristic to be able to see in filmy material, the analysis of filmy material already was the use of onefold technology no longer, and should be a variety of analytic test technologies is integrated apply. Because avery kind of analyses a technology to have its strong point,this is, also put in limitation at the same time. Accordingly, the structure that wants a system to study filmy material surface or interface, physics and chemical character must understand an analysis to test a technology (especially contemporary analysis technology) characteristic, apply a variety of analysises to check an instrument neatly, get the the directest, most comprehensive information thereby. Filmy material analyses the main component that regards the surface as the project, those who believe the development as contemporary analysis technology and test medium is ceaseless and perfect, as researcher of integrated knowledge level rise ceaselessly and of much discipline knowledge use integratedly, be sure to get more thorough development. CNC Milling CNC Machining